Semiconductor manufacture system dynamic scheduling based on HCTPN and GA

One of the key solutions to improve the competition advantage of semiconductor manufacturing system (SMS) is to improve scheduling of SMS. To cope with this challenge, the hierarchical colored-timed Petri net (HCTPN) model based GA (genetic algorithm) scheduling approach is proposed in this paper. With the HCTPN model, all possible behaviors of SMS can be predicted. We predict the bottleneck machine groups of the production line by their utilization rates, the GA and heuristic scheduling rules are integrated, and GA is employed to optimize the combination of integrated rules at each production cycle. The results of simulation experiments verify the feasibility of the proposed strategy.