DocumentCode
519861
Title
Design principles and sensitivity analysis of MEMS cantilever sensors
Author
Matviykiv, Oleh ; Lobur, Mykhaylo
Author_Institution
CADS Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2010
fDate
20-23 April 2010
Firstpage
230
Lastpage
232
Abstract
The aim of this work is to establish design principles and model equations for analysing sensitivity of MEMS cantilever sensors. Sensitivity and quality factor were estimated to be the most important parameters for MEMS cantilever sensors.
Keywords
Q-factor; cantilevers; microsensors; sensitivity analysis; MEMS cantilever sensors; model equations; quality factor; sensitivity analysis; Acoustic beams; Chemical sensors; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Piezoresistive devices; Resonance; Resonant frequency; Sensitivity analysis; Structural beams; Cantilever sensor; Design principles; Sensitivity analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location
Lviv
Print_ISBN
978-1-4244-7325-0
Electronic_ISBN
978-966-2191-11-0
Type
conf
Filename
5499272
Link To Document