• DocumentCode
    520065
  • Title

    Fabrication of high Q microdisk resonators using thermal nanoimprint lithography

  • Author

    Schiavone, P. ; Chaix, N. ; Li, Q. ; Eftekhar, A. ; Yegnanarayanan, S. ; Adibi, A.

  • Author_Institution
    CNRS, Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate the fabrication of high Q microdisk resonators on an SOI platform using thermal nanoimprint lithography. The achieved Q factor is 60000 for 2 μm radius disks. Arrays of 32 resonators show uniform spectral response.
  • Keywords
    micromechanical resonators; nanolithography; high Q microdisk resonators; thermal nanoimprint lithography; Etching; Integrated optics; Nanolithography; Optical arrays; Optical device fabrication; Optical resonators; Q factor; Resists; Silicon; Thermal engineering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5499625
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=520065