DocumentCode
520190
Title
Silicon RF MEMS based optical modulator
Author
Sridaran, Suresh ; Bhave, Sunil A.
Author_Institution
OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
This paper reports on the co-fabrication of photonic whispering gallery mode disk resonators and RF MEMS radial contour mode resonators on the same SOI substrate. By mechanically coupling the MEMS and photonic resonators, we have demonstrated a silicon RF MEMS based optical modulator which can modulate light with wavelength 1560 nm at 288 MHz.
Keywords
acousto-optical modulation; integrated optics; micromechanical resonators; silicon; silicon-on-insulator; whispering gallery modes; RF MEMS radial contour mode resonators; acousto-optical modulation; frequency 288 MHz; optical modulator; photonic whispering gallery mode disk resonators; wavelength 1560 nm; Optical filters; Optical interferometry; Optical modulation; Optical refraction; Optical resonators; Optical signal processing; Optical variables control; Radiofrequency microelectromechanical systems; Resonance; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5499756
Link To Document