DocumentCode
520362
Title
Spatially chirped pulses for high aspect ratio micromachining by femtosecond laser ablation
Author
Vitek, Dawn ; Adams, Daniel ; Johnson, Adrea ; Kleinfeld, David ; Backus, Sterling ; Durfee, Charles ; Squier, Jeff
Author_Institution
Dept. of Phys., Colorado Sch. of Mines, Golden, CO, USA
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
We demonstrate that spatially chirped femtosecond laser pulses overcome previous limitations for the machining of high-aspect ratio features with low numerical aperture beams in optically transparent materials.
Keywords
chirp modulation; high-speed optical techniques; laser ablation; laser beam machining; micromachining; femtosecond laser ablation; high aspect ratio micromachining; numerical aperture beams; optically transparent materials; spatially chirped pulses; Apertures; Chirp; Laser ablation; Laser beams; Machining; Micromachining; Optical beams; Optical materials; Optical pulses; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5499933
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