• DocumentCode
    520747
  • Title

    Integration of nano-photonic devices for CMOS chip-to-chip optical I/O

  • Author

    Young, Ian A. ; Block, Bruce ; Reshotko, Miriam ; Chang, Peter

  • Author_Institution
    Technol. Manuf. Group, Intel Corp., Hillsboro, OR, USA
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper describes an optical interconnect solution based on a monolithic photonic CMOS architecture. A photonic CMOS process enables higher bandwidth and lower energy-per-bit for chip-to-chip optical I/O through integration of electro-optical polymer based modulators, silicon nitride waveguides and polycrystalline germanium (Ge) photodetectors in a CMOS logic process. Experimental results for both the photonic CMOS ring resonator modulators and Ge detectors demonstrate 40 Gb/s performance.
  • Keywords
    Bandwidth; CMOS process; Integrated optics; Nanoscale devices; Optical devices; Optical interconnections; Optical modulation; Optical polymers; Optical ring resonators; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500341