Title :
Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate
Author :
Nomura, W. ; Yatsui, T. ; Yanase, Y. ; Suzuki, K. ; Fujita, M. ; Kamata, A. ; Naruse, M. ; Ohtsu, M.
Author_Institution :
Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.
Keywords :
aluminium compounds; ceramics; laser materials processing; sputter deposition; surface treatment; Al2O3; ceramic substrate; laser irradiation; self-organized nonadiabatic optical near-field assisted sputtering; size 0.79 nm; size 3.2 nm; surface scratches repairing; wavelength 473 nm; Aluminum oxide; Ceramics; Geometrical optics; Nanophotonics; Optical scattering; Optical surface waves; Radio frequency; Sputtering; Surface emitting lasers; Surface waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
