• DocumentCode
    521097
  • Title

    Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate

  • Author

    Nomura, W. ; Yatsui, T. ; Yanase, Y. ; Suzuki, K. ; Fujita, M. ; Kamata, A. ; Naruse, M. ; Ohtsu, M.

  • Author_Institution
    Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.
  • Keywords
    aluminium compounds; ceramics; laser materials processing; sputter deposition; surface treatment; Al2O3; ceramic substrate; laser irradiation; self-organized nonadiabatic optical near-field assisted sputtering; size 0.79 nm; size 3.2 nm; surface scratches repairing; wavelength 473 nm; Aluminum oxide; Ceramics; Geometrical optics; Nanophotonics; Optical scattering; Optical surface waves; Radio frequency; Sputtering; Surface emitting lasers; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500706
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=521097