• DocumentCode
    521233
  • Title

    Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography

  • Author

    Ay, F. ; Bernhardi, E.H. ; Agazzi, L. ; Bradley, J.D.B. ; Wörhoff, K. ; Pollnau, M. ; de Ridder, R.M.

  • Author_Institution
    Integrated Opt. Microsyst. Group, Univ. of Twente, Enschede, Netherlands
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.
  • Keywords
    Bragg gratings; aluminium compounds; fibre lasers; focused ion beam technology; optical fabrication; optical waveguides; Al2O3; Bragg gratings; channel waveguides; focused ion beam milling; laser interference lithography; on-chip waveguide lasers; optical grating cavities; Aluminum oxide; Bragg gratings; Etching; Interference; Lithography; Milling; Optical resonators; Optical waveguides; Particle beam optics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500847
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=521233