• DocumentCode
    521497
  • Title

    Micro- and nano- scale system manufacturing using ultrafast lasers

  • Author

    Bellouard, Y.

  • Author_Institution
    Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Microsystems perform sophisticated tasks in miniaturized volumes. Shaping or analyzing light signals, mixing ultra-small volumes of chemicals, sensing mechanical signals, manipulating micro-objects, sequencing bio-molecules are common operations that can be done by these tiny machines. To further advance the field, there is a growing interest for integrated manufacturing platform where optics, fluid handling capabilities or micro-mechanical elements can be combined.
  • Keywords
    laser materials processing; micromechanical devices; optical fabrication; bio-molecules sequencing; chemicals mixing; light signals analyzing; light signals shaping; mechanical signals sensing; micro-objects manipulation; micro-scale system manufacturing; microsystems; nano-scale system manufacturing; ultrafast lasers; Biochemical analysis; Biomedical optical imaging; Chemical analysis; Chemical lasers; Integrated optics; Manufacturing; Optical mixing; Optical sensors; Signal analysis; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5501124