Research on Bond Graph Simulation for Dynamic Performance Analysis of MEMS

Referring to the natures of nonlinear dynamics and coupled energy domains presented by Micro-Electro-Mechanical Systems (MEMS), a bond graph based coupled modeling and simulation methodology is put forward. With this method, the lumped sub models that consist of the multi-port field and junction structures of bond graphs are used to describe the behavior of micro components. Then, on the basis of the sub-models, a component template library (e.g. electro-thermal resistors, beams, plate masses, electrostatic gaps, and so on) for dynamic analysis also be established. According to the principle of conservation of energy, those simulation components can be used to construct the whole coupled micro systems by designers conveniently. At last, the correspondent software prototype is also developed. And taken a piezoelectric micro hydraulic transducer (MHT) as an example, the corresponding modeling processes and the simulation results prove that this bond graph modeling and simulation theory is quite effective for MEMS dynamic performance simulation.