Title :
Finite element analysis of circular quartz crystal with arc force and force -frequency sensitive experiments
Author :
Li, Shaopeng ; Tian, Wenjie ; Qingjiang, Zhao
Author_Institution :
Res. Centre of Sensor Technol., Beijing Inf. Sci. & Technol. Univ., Beijing, China
Abstract :
Stress distribution of the circular quartz crystal in various regions was performed by using ANSYS finite element simulation when plus with different arc force along x axis. The ratio of stress variety for the center of three electrodes on the chip was calculated. Frequency change of three electrodes was tested on experiment, and the ratio of force-frequency sensitivity coefficient has been calculated. The comparison with experimental data shows that: the results of ANSYS simulation analysis are similar with the experiment, and the maximum relative error is 1.09%. So this proves that ANSYS simulation analysis is feasible.
Keywords :
Acceleration; Analytical models; Electrodes; Finite element methods; Force sensors; Frequency measurement; Resonance; Resonant frequency; Strain measurement; Stress; ANSYS; arc force; force-frequency sensitivity coefficients; quartz resonator; stress distribution;
Conference_Titel :
Industrial Mechatronics and Automation (ICIMA), 2010 2nd International Conference on
Conference_Location :
Wuhan, China
Print_ISBN :
978-1-4244-7653-4
DOI :
10.1109/ICINDMA.2010.5538192
