Finite element analysis of circular quartz crystal with arc force and force -frequency sensitive experiments

Author

Li, Shaopeng ; Tian, Wenjie ; Qingjiang, Zhao

Author_Institution

Res. Centre of Sensor Technol., Beijing Inf. Sci. & Technol. Univ., Beijing, China

Volume

1

fYear

2010

fDate

30-31 May 2010

Firstpage

498

Lastpage

501

Abstract

Stress distribution of the circular quartz crystal in various regions was performed by using ANSYS finite element simulation when plus with different arc force along x axis. The ratio of stress variety for the center of three electrodes on the chip was calculated. Frequency change of three electrodes was tested on experiment, and the ratio of force-frequency sensitivity coefficient has been calculated. The comparison with experimental data shows that: the results of ANSYS simulation analysis are similar with the experiment, and the maximum relative error is 1.09%. So this proves that ANSYS simulation analysis is feasible.

Keywords

Acceleration; Analytical models; Electrodes; Finite element methods; Force sensors; Frequency measurement; Resonance; Resonant frequency; Strain measurement; Stress; ANSYS; arc force; force-frequency sensitivity coefficients; quartz resonator; stress distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Mechatronics and Automation (ICIMA), 2010 2nd International Conference on

Conference_Location

Wuhan, China

Print_ISBN

978-1-4244-7653-4

Type

conf

DOI

10.1109/ICINDMA.2010.5538192

Filename

5538192