High-accuracy shape measurement by whole-space tabulation board applied to electronic packaging

In this study, high-accuracy shape measurement by grating projection method applied to electronic packaging using whole-space tabulation board. The memory of the board has a phase analysis table and phase-coordinate tables. The brightness data of the recorded grating are stored in the phase analysis table to obtain the phase of the recorded grating. The calibration data using a moving reference plane are stored as a phase-coordinate table to obtain the coordinates of the phase. An experiment to evaluate this system was performed. The analysis speed of shape measurement using the memory board did not depend on a speed of a personal computer. The accuracy of shape measurement using the memory board and using software was almost the same. The analysis speed using the memory board was faster than the one using software.