Evaluation of stroke and force of enlargement mechanism

Author

Morimoto, Yoshitaka ; Okada, Suguru

Author_Institution

Dept. of Mech. Eng., Kanazawa Inst. of, Ishikawa, Japan

fYear

2010

fDate

18-21 Aug. 2010

Firstpage

3159

Lastpage

3164

Abstract

A new positioning device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the table by submicron meter. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 4 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 5 Hz which is enough wide for the frequency response to realize the precise positioning. The positioning stage is controlled by PI control. The positioning accuracy is accurate enough for the precise positioning.

Keywords

PI control; cutting; cutting tools; drives; force control; position control; PI control; PZT drive; cutting tool stage; enlargement mechanism; fluid chamber; force evaluation; mechanical principal; positioning stage; stroke evaluation; submicron meter; Bellows; Displacement measurement; Force; Frequency response; Performance evaluation; Position measurement; Voltage measurement; Enlargement mechanism; Non-circle cutting; PZT; Positioning accuracy; Thrust force;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE Annual Conference 2010, Proceedings of

Conference_Location

Taipei

Print_ISBN

978-1-4244-7642-8

Type

conf

Filename

5602909