Thermal image and analysis of a 28.3 THz 0.18µm CMOS detector

This paper presents the measured results of the distributed thermal image of a 28.3 THz CMOS thermal detector of area 65 um * 45 um, consisting of antenna, thermal-coupling and thermal sensing circuit elements integrated monolithically. In contrast to the conventional THz thermal detectors, the proposed detector design shows subtle temperature distribution profile of the CMOS detector, leading to understanding of the individual role of the building element of the detector and confirmation of the design approach for future improvement.