• DocumentCode
    533364
  • Title

    Measurements to establish process ESD compatibility

  • Author

    Steinman, Arnold ; Henry, Leo G. ; Hernandez, Marcos

  • Author_Institution
    Electron. Workshop, Berkeley, CA, USA
  • fYear
    2010
  • fDate
    3-8 Oct. 2010
  • Firstpage
    1
  • Lastpage
    8
  • Abstract
    Currently, there are no standards for establishing equipment or process capability to handle devices of known ESD sensitivity. Correlating verification measurement tools with parameters of device testing is a first step. Measurements with a contacting high impedance voltmeter and ESD event detectors are compared to voltages and discharges of HBM and CDM testing.
  • Keywords
    electrostatic discharge; sensitivity analysis; testing; voltmeters; CDM testing; ESD event detectors; ESD sensitivity; HBM discharges; contacting high impedance voltmeter; device testing; process ESD compatibility; verification measurement tool correlation; Calibration; Current measurement; Detectors; Discharges; Electrostatic discharge; Testing; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/ Electrostatic Discharge Symposium (EOS/ESD), 2010 32nd
  • Conference_Location
    Reno, NV
  • Print_ISBN
    978-1-58537-182-2
  • Electronic_ISBN
    978-1-58537-182-2
  • Type

    conf

  • Filename
    5623733
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=533364