DocumentCode
533830
Title
Switchable bulk acoustic wave resonator based on ferroelectric films
Author
Mikhailov, K.A. ; Ptashnik, V.S. ; Kozyrev, B.A.
Author_Institution
St. Petersburg State Electrotech. Univ. (LETI), St. Petersburg, Russia
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
696
Lastpage
697
Abstract
The calculation of eigen acoustic modes of multilayer microwave capacitance structure with thin ferroelectric films in paraelectric state is carried out. For estimation of excitation efficiency of bulk acoustic waves (BAW) by ferroelectric films the system of electromechanical equations is solved and spatial distribution of mechanical displacements in the structure is presented. Finally, the switch ability of eigen acoustic modes for novel switchable BAW resonator is discussed.
Keywords
bulk acoustic wave devices; ferroelectric devices; resonators; eigen acoustic mode; electromechanical equation; mechanical displacement; multilayer microwave capacitance structure; paraelectric state; spatial distribution; switch ability; switchable BAW resonator; switchable bulk acoustic wave resonator; thin ferroelectric film; Acoustic waves; Capacitors; Ferroelectric films; Microwave filters; Microwave oscillators; Nonhomogeneous media;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632613
Filename
5632613
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