DocumentCode :
533951
Title :
Formation of phase composition and structure in nanodimensional films on base of CoSb3 skutterudite — Functional elements of thermoelectricity
Author :
Makogon, Yu.N. ; Pavlova, E.P. ; Sidorenko, S.I. ; Beddies, G. ; Shkarban, P.A. ; Bogdanov, S.E.
Author_Institution :
Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
fYear :
2010
fDate :
13-17 Sept. 2010
Firstpage :
793
Lastpage :
794
Abstract :
This research is devoted to the study of formation processes of CoSb3 skutterudite phase in nanodimensional CoSb3(30 nm)/SiO2(100 nm)/Si(001) film systems.
Keywords :
antimony compounds; cobalt compounds; nanofabrication; nanostructured materials; semiconductor thin films; silicon; silicon compounds; skutterudites; thermoelectricity; CoSb3 skutterudite phase formation processes; CoSb3-SiO2-Si; functional elements; nanodimensional CoSb3-SiO2-Si(001) film systems; nanodimensional films; phase composition; size 100 nm; size 30 nm; thermoelectricity; Annealing; Conductivity; Films; Nanostructures; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
Type :
conf
DOI :
10.1109/CRMICO.2010.5632755
Filename :
5632755
Link To Document :
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