DocumentCode
533951
Title
Formation of phase composition and structure in nanodimensional films on base of CoSb3 skutterudite — Functional elements of thermoelectricity
Author
Makogon, Yu.N. ; Pavlova, E.P. ; Sidorenko, S.I. ; Beddies, G. ; Shkarban, P.A. ; Bogdanov, S.E.
Author_Institution
Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
793
Lastpage
794
Abstract
This research is devoted to the study of formation processes of CoSb3 skutterudite phase in nanodimensional CoSb3(30 nm)/SiO2(100 nm)/Si(001) film systems.
Keywords
antimony compounds; cobalt compounds; nanofabrication; nanostructured materials; semiconductor thin films; silicon; silicon compounds; skutterudites; thermoelectricity; CoSb3 skutterudite phase formation processes; CoSb3-SiO2-Si; functional elements; nanodimensional CoSb3-SiO2-Si(001) film systems; nanodimensional films; phase composition; size 100 nm; size 30 nm; thermoelectricity; Annealing; Conductivity; Films; Nanostructures; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632755
Filename
5632755
Link To Document