• DocumentCode
    533951
  • Title

    Formation of phase composition and structure in nanodimensional films on base of CoSb3 skutterudite — Functional elements of thermoelectricity

  • Author

    Makogon, Yu.N. ; Pavlova, E.P. ; Sidorenko, S.I. ; Beddies, G. ; Shkarban, P.A. ; Bogdanov, S.E.

  • Author_Institution
    Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
  • fYear
    2010
  • fDate
    13-17 Sept. 2010
  • Firstpage
    793
  • Lastpage
    794
  • Abstract
    This research is devoted to the study of formation processes of CoSb3 skutterudite phase in nanodimensional CoSb3(30 nm)/SiO2(100 nm)/Si(001) film systems.
  • Keywords
    antimony compounds; cobalt compounds; nanofabrication; nanostructured materials; semiconductor thin films; silicon; silicon compounds; skutterudites; thermoelectricity; CoSb3 skutterudite phase formation processes; CoSb3-SiO2-Si; functional elements; nanodimensional CoSb3-SiO2-Si(001) film systems; nanodimensional films; phase composition; size 100 nm; size 30 nm; thermoelectricity; Annealing; Conductivity; Films; Nanostructures; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-7184-3
  • Type

    conf

  • DOI
    10.1109/CRMICO.2010.5632755
  • Filename
    5632755