DocumentCode
533978
Title
The basic aspects of the general theory of scanning microwave microscopy
Author
Gordienko, Yu.Ye. ; Larkin, Yu S.
Author_Institution
Kharkov Nat. Univ. of Radioelectron., Kharkov, Ukraine
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
1029
Lastpage
1030
Abstract
The numerical modeling of electrodynamics of interaction of the coaxial resonator microprobe with dielectric and semiconductor objects allowed ascertaining some dependence of signal parameters of primary transformation of the information on the geometry of probe aperture and electrophysical parameters of an object. Numerical-analytical and experimental research after detector transformation of signals have determined a general theoretical aspects of various ways of this stage of signal forming. The preconditions of forming of the general theory of SMM are created.
Keywords
electrodynamics; electron probe analysis; geometry; scanning electron microscopy; SMM general theory; coaxial resonator microprobe; dielectric objects; electrodynamics; numerical modeling; scanning microwave microscopy; semiconductor objects; Apertures; Microscopy; Microwave imaging; Microwave measurements; Microwave theory and techniques; Probes; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632786
Filename
5632786
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