DocumentCode
533998
Title
Express method of determination of the gas pressure optimal for microwave plasma chemical materials processing
Author
Bordusov, S.V. ; Madveiko, S.I. ; Dostanko, A.P.
Author_Institution
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
779
Lastpage
780
Abstract
A method of rapid determination of gas pressure value, which provides the most favorable conditions for microwave plasma chemical processing at low vacuum, is developed. The method is based on the characteristic property of microwave plasma materials processing which consists in pulsation nature of microwave discharge.
Keywords
discharges (electric); plasma diagnostics; plasma materials processing; gas pressure optimal determination; microwave discharge nature; microwave plasma chemical materials processing; vacuum; Chemicals; Delay; Discharges; Materials; Microwave theory and techniques; Plasma properties;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632811
Filename
5632811
Link To Document