Title :
A scheduling method in semiconductor manufacturing lines based on genetic algorithm and simulated annealing algorithm
Author :
Tang Chun-hui ; Yu-Liang, Qian ; Jun, Zhu ; Shu-jia, Yan
Author_Institution :
Sch. of Opt.-Electr. & Comput. Eng., Univ. of Shanghai for Sci. & Technol., Shanghai, China
Abstract :
Semiconductor manufacturing is one of the most complex manufacturing process. And job scheduling is a major problem in the semiconductor operation. A method of job scheduling in semiconductor manufacturing lines is proposed based on genetic algorithm and simulated annealing algorithm. Firstly each job is given a set of machine processing set* based on genetic algorithm, then the processing sequence of each machine can be arranged based on simulated annealing. This paper presents the reason and the solution in detail. The Minifab model is solved by the method and the result proves that this method is effective.
Keywords :
genetic algorithms; manufacturing systems; scheduling; semiconductor device manufacture; simulated annealing; genetic algorithm; job scheduling; machine processing set; minifab model; semiconductor manufacturing line; simulated annealing algorithm; Annealing; genetic algorithm; minifab model; semiconductor manufacturing; simulated annealing algorithm; workpiece scheduling;
Conference_Titel :
Information Networking and Automation (ICINA), 2010 International Conference on
Conference_Location :
Kunming
Print_ISBN :
978-1-4244-8104-0
Electronic_ISBN :
978-1-4244-8106-4
DOI :
10.1109/ICINA.2010.5636524
