Title :
A novel filter rating method for less than 30 nm particle
Author :
Mizuno, Takehito ; Namiki, Akihisa ; Tsuzuki, Shuichi ; Numaguchi, Toru
Author_Institution :
Nihon Pall Ltd., 46, Kasuminosato, Ami-machi, Inashiki-gun, Ibaraki 300-0315 Japan
Abstract :
This paper describes a novel filter rating method beyond the current 30 nm limit by combining dynamic light scattering (DLS) and ICP-MS technique, and proposes the usage of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition was investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface.
Keywords :
Atmospheric measurements; Biomembranes; Erbium; Gold; Nanoparticles; Particle measurements; Size measurement;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
Electronic_ISBN :
1523-553X
