Title :
Design and modeling of a wide tuning range, high Q, low supply voltage MEMS based tunable capacitor for wireless communication applications
Author :
Sreeja, B.S. ; Radha, S.
Abstract :
A simulation model for the analysis of MEMS capacitor has been developed using mechanical equivalencies. The capacitor structure used in this paper has four parallel plates to improve the tuning range. Two of the plates are suspended and the other two plates are fixed. The developed mechanical model is validated with the help of structure simulations performed using PolyMumps process. The simulation results show good correlation between the equivalent mechanical model and the structural model.
Keywords :
capacitors; micromechanical devices; radiocommunication; MEMS capacitor; PolyMumps process; capacitor structure; high Q low supply voltage MEMS; mechanical model; parallel plates; simulation model; structural model; structure simulation; tunable capacitor; wireless communication application; Analytical models; Capacitance; Capacitors; Equations; Mathematical model; Micromechanical devices; Springs; MEMS capacitor; Mechanical model;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
