Expert system design of beam spot size measurements in FIB system

Author

Ali, Fadhil A.

Author_Institution

Comput. Eng. Dept., Basra Univ., Basra, Iraq

fYear

2010

fDate

Nov. 30 2010-Dec. 2 2010

Firstpage

168

Lastpage

172

Abstract

This is a design of an expert system in the focused ion beam optical system by using fuzzy logic technique to build an intelligent agent. Present software has been designed as an interpretation expert system, written in Visual C# for optimizing the calculation of three electrostatic lenses column. By using such rule based engine, the axial potential distributions for electrostatic fields undergo the constraints have been used to find spot size focusing for ions in the image plane which have values are very useful for getting and designing FIB model, over ranges of ion beam angles (5,10,30,50,75 and 100) mrad.

Keywords

C language; electrostatic lenses; expert systems; fuzzy logic; ion beam lithography; optical computing; software agents; visual programming; FIB system; beam spot size measurement; electrostatic lense column; focused ion beam; fuzzy logic; image plane; intelligent agent; interpretation expert system; ion beam optical system; rule based engine; spot size focusing; visual C#; Algorithms; Electrostatics; Expert systems; Ion beams; Lenses; Optical imaging; Software;

fLanguage

English

Publisher

ieee

Conference_Titel

Energy, Power and Control (EPC-IQ), 2010 1st International Conference on

Conference_Location

Basrah

Electronic_ISBN

978-0-9568330-0-6

Type

conf

Filename

5767305