Title :
Design methodology and workflow for MEMS design
Author :
Petrenko, Anatoliy
Author_Institution :
NTUU "Kiev Polytech. Inst.", Kiev, Ukraine
Abstract :
In this paper MEMS models for different abstraction levels (from device level till system level) are considered. The workflow for MEMS design as a whole is presented.
Keywords :
design; micromechanical devices; MEMS design; design methodology; workflow; Computational modeling; Equations; Finite element methods; Integrated circuit modeling; Mathematical model; Micromechanical devices; Read only memory; FEM/FDM Model; MEMS system-level model; ROM (Reduced Order Model);
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
