• DocumentCode
    548228
  • Title

    Design methodology and workflow for MEMS design

  • Author

    Petrenko, Anatoliy

  • Author_Institution
    NTUU "Kiev Polytech. Inst.", Kiev, Ukraine
  • fYear
    2011
  • fDate
    11-14 May 2011
  • Firstpage
    12
  • Lastpage
    15
  • Abstract
    In this paper MEMS models for different abstraction levels (from device level till system level) are considered. The workflow for MEMS design as a whole is presented.
  • Keywords
    design; micromechanical devices; MEMS design; design methodology; workflow; Computational modeling; Equations; Finite element methods; Integrated circuit modeling; Mathematical model; Micromechanical devices; Read only memory; FEM/FDM Model; MEMS system-level model; ROM (Reduced Order Model);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
  • Conference_Location
    Polyana
  • Print_ISBN
    978-1-4577-0639-4
  • Electronic_ISBN
    978-966-2191-18-9
  • Type

    conf

  • Filename
    5960243
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=548228