R&D of micron sized nanoionic supercapacitors for self-powered MEMS in deep-sub-voltage regime

Author

Despotuli, Alexandr ; Andreeva, Alexandra

Author_Institution

Inst. of Microelectron. Technol. & High Purity Mater., Instn. of the Russian Acad. of Sci., Chernogolovka, Russia

fYear

2011

fDate

11-14 May 2011

Firstpage

104

Lastpage

110

Abstract

The development of impulse micron-sized sub-voltage supercapacitors (SCs) was initiated within the framework of a new direction, ≪nanoionics of advanced superionic conductors≫. A search for applications of nanoionic SCs was made with regard to the development of deep-sub-voltage nanoelectronics, self-powered nanosystems and related high-tech directions. New nanoionic fundamentals are introduced and the ways for the creation of advanced carbon-based nanostructures suited for different types of SCs are proposed.

Keywords

micromechanical devices; nanoelectronics; research and development; supercapacitors; R&D; carbon-based nanostructure; deep-sub-voltage nanoelectronics; deep-sub-voltage regime; impulse micron-sized sub-voltage supercapacitor; micron sized nanoionic supercapacitor; self-powered MEMS; self-powered nanosystem; superionic conductor; Capacitors; Carbon; Conductors; Heterojunctions; Materials; Nanoelectronics; Nanoscale devices; Advanced Superionic Conductors; Carbon Nanostructures; Deep-Sub-Voltage Nanoelectronics; Nanoionic Supercapacitors; Nanoionics;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on

Conference_Location

Polyana

Print_ISBN

978-1-4577-0639-4

Electronic_ISBN

978-966-2191-18-9

Type

conf

Filename

5960286