Cantilever arrayed blood pressure sensor for arterial applanation tonometry

Author

Byeungleul Lee ; Jinwoo Jeong ; Jinseok Kim ; Bonghwan Kim ; Kukjin Chun

Author_Institution

Dept. of Mechatron. Eng., Korea Univ. of Technol. & Educ., Cheonan, South Korea

Volume

8

Issue

1

fYear

2014

fDate

Mar-14

Firstpage

37

Lastpage

43

Abstract

The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and the width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between the adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg (= 120 kPa) and less than 1 mmHg (= 133.3 Pa), respectively.

Keywords

biomedical equipment; biomembranes; blood pressure measurement; blood vessels; cantilevers; elemental semiconductors; micromachining; piezoresistive devices; polymers; pressure sensors; resistors; sensitivity; silicon; (111) silicon bulk-micromachining; Si; arterial applanation tonometry; cantilever-arrayed blood pressure sensor array; contact force; continuous blood pressure measurement; noninvasive blood pressure measurement; piezoresistor; polydimethylsiloxane package; resistance; sensitivity; size 5 mum to 310 mum; thick metal pads; thick-arrayed perforated membrane;

fLanguage

English

Journal_Title

Nanobiotechnology, IET

Publisher

iet

ISSN

1751-8741

Type

jour

DOI

10.1049/iet-nbt.2013.0046

Filename

6780336