• DocumentCode
    551349
  • Title

    Selective deposition of carbon nanowalls and investigation of their emission properties

  • Author

    Evlashin, S. ; Borisov, V. ; Pilevskii, A. ; Stepanov, A. ; Suetin, N. ; Rakhimov, A.

  • Author_Institution
    Dept. of Microelectron., Moscow State Univ., Moscow, Russia
  • fYear
    2011
  • fDate
    18-22 July 2011
  • Firstpage
    129
  • Lastpage
    130
  • Abstract
    In this work we discuss emission characteristics of carbon nanowalls on porous silicon. The samples used were n-type Si 4,5 Ω cm and p-type Si 3 Ω cm. Surface modifications were made using photoelectrochemical methods. After that, the carbon nanowalls were grown on the substrates using a PECVD method after which the emission characteristics were measured. The carbon nanostructures on porous silicon were grown without additional treatment. These samples show a low emission threshold and a good current density. Different etching regimes were studied. The maximum current density was more than 6 A/cm2.
  • Keywords
    carbon; current density; elemental semiconductors; emission; etching; nanofabrication; nanostructured materials; photoelectrochemistry; plasma CVD; porous materials; silicon; C; PECVD method; Si; carbon nanowalls; current density; emission properties; etching; low emission threshold; photoelectrochemical methods; porous silicon; resistivity 3 ohmcm to 5 ohmcm; selective deposition; surface modifications; Carbon; Carbon dioxide; Current density; Etching; Films; Silicon; carbon nanowalls; emission properties; porous silicon; selective deposition;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
  • Conference_Location
    Wuppertal
  • ISSN
    pending
  • Print_ISBN
    978-1-4577-1243-2
  • Electronic_ISBN
    pending
  • Type

    conf

  • Filename
    6004596