Title :
Selective deposition of carbon nanowalls and investigation of their emission properties
Author :
Evlashin, S. ; Borisov, V. ; Pilevskii, A. ; Stepanov, A. ; Suetin, N. ; Rakhimov, A.
Author_Institution :
Dept. of Microelectron., Moscow State Univ., Moscow, Russia
Abstract :
In this work we discuss emission characteristics of carbon nanowalls on porous silicon. The samples used were n-type Si 4,5 Ω cm and p-type Si 3 Ω cm. Surface modifications were made using photoelectrochemical methods. After that, the carbon nanowalls were grown on the substrates using a PECVD method after which the emission characteristics were measured. The carbon nanostructures on porous silicon were grown without additional treatment. These samples show a low emission threshold and a good current density. Different etching regimes were studied. The maximum current density was more than 6 A/cm2.
Keywords :
carbon; current density; elemental semiconductors; emission; etching; nanofabrication; nanostructured materials; photoelectrochemistry; plasma CVD; porous materials; silicon; C; PECVD method; Si; carbon nanowalls; current density; emission properties; etching; low emission threshold; photoelectrochemical methods; porous silicon; resistivity 3 ohmcm to 5 ohmcm; selective deposition; surface modifications; Carbon; Carbon dioxide; Current density; Etching; Films; Silicon; carbon nanowalls; emission properties; porous silicon; selective deposition;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending