Title :
Fabrication of PMMA film waveguides utilizing proton beam writing
Author :
Miura, Kenta ; Satoh, Takahiro ; Ishii, Y. ; Kohka, Masashi ; Machida, Yuki ; Uehara, Masato ; Kiryu, Hiromu ; Takano, Katsuyoshi ; Ohkubo, Takeru ; Yamazaki, Akiyoshi ; Kada, Wataru ; Yokoyama, Akihito ; Kamiya, Tomihiro ; Nishikawa, Hiroyuki ; Sasaki, T
Author_Institution :
Grad. Sch. of Eng., Gunma Univ., Kiryu, Japan
Abstract :
Proton beam writing (PBW) has attracted much attention recently as a next generation micro-fabrication technology. We fabricated the first single-mode, straight-line waveguides and Y-junction waveguides for λ=1.55 μm consisting of PMMA films using the PBW technique.
Keywords :
microfabrication; optical fabrication; optical polymers; optical waveguides; polymer films; PMMA film waveguides; Y-junction waveguides; next generation microfabrication technology; proton beam writing; single-mode straight-line waveguides; wavelength 1.55 mum; Optical device fabrication; Optical waveguides; Protons;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9
