• DocumentCode
    552072
  • Title

    Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators

  • Author

    Koh, Kah How ; Kobayashi, Takeshi ; Lee, Chengkuo

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2011
  • fDate
    4-8 July 2011
  • Firstpage
    323
  • Lastpage
    324
  • Abstract
    Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.
  • Keywords
    cantilevers; elemental semiconductors; gold; integrated optics; lead compounds; micro-optomechanical devices; micromirrors; piezoelectric actuators; piezoelectric thin films; silicon; 2D raster scanning applications; Au; MEMS mirror; PZT; gold-coated MEMS mirror; piezoelectric Pb(Zr,Ti)O<;sub>;3<;/sub>; actuators; silicon cantilever beam; thin film cantilever actuators; variable optical attenuation; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Optical device fabrication; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Opto-Electronics and Communications Conference (OECC), 2011 16th
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-288-2
  • Electronic_ISBN
    978-986-02-8974-9
  • Type

    conf

  • Filename
    6015145
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=552072