A multi-domain electrostatic actuator design tool based on analytical models

One of the most promising and evolving technology is MEMS. Its market has grown rapidly in recent years. It is the merit of simulation techniques evolution, which allows estimation of a device performance before its fabrication and consequently reducing the time to market and the production costs. One of the most popular technique is FEM analysis due to its wide range of application and ability of performing multi-domain simulation. However, it has some disadvantages concerning simulation time. Often, simulations of some simple devices are time consuming. One of them is an electrostatic actuator that needs nonlinear analysis. Moreover, a bended membrane form induces additional complex calculations. It seems that fast and reliable analytical modeling will be a good alternative. In this paper, a dedicated tool for micromachined membrane-based electrostatic actuator is presented.