Simulation of the self-sensing actuators based on multi-piezoelectric effects of piezoelectric crystal

Based on the theory of classical piezoelectricity and the rapid development of piezoelectric material today, it has become possible to integrate structure and function of sensor with actuators into the single piezoelectric element. This paper analyzes and simulates integrated sensor-actuators using coupled-field analysis function in the finite element analysis software ANSYS for 3-D finite element model which of models is PZT-5 piece. In the beginning of positive piezoelectric effect, the results show that voltage and displacement generated by secondary converse piezoelectric effects respectively have linear relationship with the applied outside force. The simulation results are proved that the functions of sensors and actuators can be integrated in the single piezoelectric crystal.