Surface fitting compensation research of diffusible silicon pressure transducer

Author

Mingru Zeng ; Liang Liu ; Xin Qian ; Wentang You

Author_Institution

Sch. of Inf. Eng., Nanchang Univ., Nanchang, China

Volume

5

fYear

2011

fDate

12-14 Aug. 2011

Firstpage

2219

Lastpage

2221

Abstract

In order to resolve the problem of diffusible silicon pressure transducer for non-linear characteristics, easily affected by temperature and thus leading to lower measurement precision, a compensation program based on least square surface fitting is proposed. A mathematical model of surface fitting between transducer´s measured pressure, operating temperature and output voltage is established, it can be easily calculated the pressure of the transducer after obtain the output voltage and the operating temperature. The result of experiments shows that the compensation algorithm has higher accuracy. In addition, because of the order of the fitting model is lower, the time of compensation calculation is shorter, and the feasibility of compensation algorithm is ensured.

Keywords

least squares approximations; pressure measurement; pressure transducers; silicon; surface fitting; Si; compensation algorithm; diffusible pressure transducer; mathematical model; nonlinear characteristics; precision measurement; pressure measurement; surface fitting compensation research; Fitting; Mathematical model; Surface fitting; Temperature; Temperature measurement; Transducers; Voltage measurement; diffusible silicon; pressure transducer; surface fitting;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on

Conference_Location

Harbin, Heilongjiang, China

Print_ISBN

978-1-61284-087-1

Type

conf

DOI

10.1109/EMEIT.2011.6023551

Filename

6023551