DocumentCode
557335
Title
Investigation of millimeter wave membrane supported structures up to 110 GHz
Author
Bunea, A.C. ; Neculoiu, D. ; Stefanescu, A. ; Buiculescu, C. ; Muller, A.
Author_Institution
IMT-Bucharest, Bucharest, Romania
Volume
1
fYear
2011
fDate
17-19 Oct. 2011
Firstpage
207
Lastpage
210
Abstract
This paper investigates a series of membrane supported millimeter wave transmission lines up to 110 GHz. Two modeling approaches, based on EM simulations and equivalent circuit, were validated by the experimental results for different test structures. The effective permittivity of a membrane supported coplanar waveguide (CPW) line was extracted from measurements and it is in very good agreement with the simulated data.
Keywords
coplanar waveguides; electromagnetic simulation; equivalent circuit; membrane supported coplanar waveguide; membrane supported millimeter wave transmission lines; millimeter wave membrane supported structures; Coplanar waveguides; Equivalent circuits; Frequency measurement; Integrated circuit modeling; Silicon; Solid modeling; Transmission line measurements; effective permittivity; electromagnetic modeling; millimeter wave components; silicon micromachining;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2011 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-61284-173-1
Type
conf
DOI
10.1109/SMICND.2011.6095760
Filename
6095760
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