Novel MEMS digital temperature sensor for wireless avian-influenza monitoring system in poultry farm

This paper presents our recent progress on the development of sensor node for wireless avian-influenza monitoring system in poultry farm. It was found that the influenza infection could be detected based on the temperature and activity monitoring at a very early stage. In order to meet the requirements of lower power consumption and high sensitivity, new micro temperature sensor technology was developed in this paper. The new temperature sensor consists of array of bimorphs that response to different temperature by the mechanism of event-driven on/off. Difference kinds of bimorph configuration and structure were developed and experimentally examined. It was found that 3D bimorph showed attractive advantages relative to traditional planar configuration including easy-to-package, compact and easy-to-fabrication. Wafer-scale 3D microfabrication is also established for the 3D bimorph.