• DocumentCode
    559604
  • Title

    Reduced order modelling of MEMS dynamics

  • Author

    Mariani, Stefano ; Azam, Saeed Eftekhar ; Ghisi, Aldo ; Corigliano, Alberto ; Simoni, Barbara

  • Author_Institution
    Dipt. di Ing. Strutturale, Politec. di Milano, Milan, Italy
  • fYear
    2011
  • fDate
    11-13 May 2011
  • Firstpage
    53
  • Lastpage
    58
  • Abstract
    The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.
  • Keywords
    accelerometers; finite element analysis; micromechanical devices; reduced order systems; MEMS dynamics; MEMS response; accidental drop events; reduced order modelling; three-dimensional finite element model; uniaxial microaccelerometer; Acceleration; Accelerometers; History; Micromechanical devices; Sensors; Springs; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
  • Conference_Location
    Aix-en-Provence
  • Print_ISBN
    978-1-61284-905-8
  • Type

    conf

  • Filename
    6108016
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=559604