Cost-Effective Schottky-Barrier Diode Array With Ni–Silicidation Accessing Low Power Phase-Change Memory

Author

Yan Liu ; Chao Zhang ; Zhitang Song ; Bo Liu ; Guanping Wu ; Jia Xu ; Lianhong Wang ; Lei Wang ; Zuoya Yang ; Songlin Feng

Author_Institution

State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China

Volume

61

Issue

3

fYear

2014

fDate

Mar-14

Firstpage

682

Lastpage

687

Abstract

A cost-effective fabrication of Schottky-barrier (SB) diode steering element for low power phase-change memory (PCM) application is realized. While superior drivability in conventional PN diode array, SB diode array with 0.0193- μm² (5F²), performing higher switching speed, sufficient drive current density of ~ 26.30 mA/μm², disturbance immunity, and lower power consumption has been manufactured under 40-nm standard complementary metal oxide semiconductor technology. Simultaneously, different performance specifications, including integration scheme, J_ON/JO_FF ratio, temperature characteristics, and scalability have been studied in detail and compared in two categories of accessing diode arrays. It manifests that the scaled SB diode array is suitable for full operation of PCM.

Keywords

CMOS memory circuits; Schottky barriers; Schottky diodes; low-power electronics; nickel; phase change memories; Ni; PCM; PN diode array; SB diode steering element; complementary metal oxide semiconductor technology; cost-effective fabrication; cost-effective schottky-barrier diode array; current density; disturbance immunity; integration scheme; low power phase-change memory; lower power consumption; nickel-silicidation; scaled SB diode array; size 40 nm; temperature characteristics; Arrays; Junctions; Phase change materials; Power demand; Schottky diodes; Temperature; Cost-effective; Schottky diode array; low power consumption; phase-change memory (PCM);

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2013.2296591

Filename

6709678