Longitudinal ion source with beam autocompensation

The longitudinal Hall-type ion source with cold electrodes are described. The source generates compensated hollow oval ion beam of 600 mm length and 50 mm width with the energy within the range of 1– 2 keV and current density of 5–20 mA/cm². The electrons compensating ion beam are generated in additional gas discharge that is excited in the region of transverse magnetic field localization near the cathode surface. It allows one to decrease the potential of dielectric surface from 700–800 V to 100–150 V, when the ion beam energy is 1 keV. The device is successfully used for low-temperature ion beam treatment of dielectric materials and plastic rolls without damages caused positive surface charges.