DocumentCode
564792
Title
Micropatterning and casting PEDOT-PSS /DMSO layers
Author
Charlot, Benoît ; Sassine, Gilbert ; Garraud, Alexandra ; Giani, Alain ; Combette, Philippe
Author_Institution
Inst. d´´Electron. du Sud, Univ. Montpellier II, Montpellier, France
fYear
2012
fDate
25-27 April 2012
Firstpage
196
Lastpage
199
Abstract
PEDOT:PSS is a conductive polymer that is widely used as electrodes in organic electronic devices. This material can also be used for implementing deformable electrodes in soft substrates for MEMS applications. However, this material being sensitive to several chemicals and water it is difficult to pattern microstructures using standard techniques. Thus, we present several techniques for patterning PEDOT:PSS conductive polymer thin film layers including PDMS Casting, shadow masking and lithography.
Keywords
casting; crystal microstructure; masks; microfabrication; micromechanical devices; semiconductor thin films; MEMS applications; PEDOT-PSS conductive polymer thin film layers; PEDOT-PSS-DMSO layer casting; conductive polymer; deformable electrodes; electrodes; lithography; micropatterning; microstructure patterning; organic electronic devices; Etching; Glass; Lithography; Plasmas; Polymers; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on
Conference_Location
Cannes
Print_ISBN
978-1-4673-0785-7
Type
conf
Filename
6235334
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