Title :
New route for BST synthesis by soft chemistry
Author :
Vincent, Adrien ; Grimal, Virginie ; Gervais, François ; Ventura, Laurent ; Poirot, Nathalie
Author_Institution :
Phys. Dept., Univ. of Tours, Tours, France
Abstract :
The purpose of this work is to develop a new route for BST synthesis. BST thin film are produced by spin coating on an oriented LNO/Si substrate. The phase purity and possible crystalline orientation are determined by XRD. BST microstructure and texturation are discussed from detailed SEM images and capacitance measurement confirm the BST performances.
Keywords :
X-ray diffraction; barium compounds; capacitance measurement; crystal microstructure; crystal orientation; ferroelectric thin films; scanning electron microscopy; spin coating; strontium compounds; texture; BST microstructure; BST synthesis; BST thin film; Ba0.6Sr0.4TiO3; LaNiO3-Si; SEM images; XRD; capacitance measurement; crystalline orientation; ferroelectric thin film; phase purity; soft chemistry; spin coating; texturation; Dielectrics; Films; Microstructure; Silicon; Substrates; Titanium; X-ray scattering; BST; Dielectric; LNO; MOD;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297819
