Title :
Magnetically controlled MEMS switches with nanoscale contact coatings
Author :
Karabanov, S.M. ; Karabanov, A.S. ; Suvorov, D.V. ; Grappe, Benoit ; Coutier, Caroline ; Sibuet, H. ; Sazhin, B.N.
Author_Institution :
Ryazan Metal Instrum. Plant JSC, Ryazan, Russia
Abstract :
The paper reports the tests results of ruthenium contacts coatings of magnetically controlled MEMS switches. During the tests the contact resistance was measured and the lifetime of MEMS switches was evaluated. After testing the analysis of the form and contact surface structure using SEM-method was carried out. The experiment results showed that the application of ruthenium nanolayers as the contact coating at slight increase of the contact resistance improves the lifetime of MEMS switches considerably.
Keywords :
coatings; contact resistance; microswitches; nanotechnology; ruthenium; scanning electron microscopy; SEM-method; contact resistance; contact surface structure; magnetically controlled MEMS switches; nanoscale contact coatings; ruthenium contacts coatings; ruthenium nanolayers; coatings; nanotechnology; switches;
Conference_Titel :
Electrical Contacts (ICEC 2012), 26th International Conference on
Conference_Location :
Beijing
Electronic_ISBN :
978-1-84919-508-9
DOI :
10.1049/cp.2012.0675
