• DocumentCode
    586520
  • Title

    New thermal method for the characterization of solid materials at different temperature levels

  • Author

    Assy, Ali ; Gomes, S. ; Chantrenne, Patrice ; Pavy, Nicolas ; Parasuraman, J. ; Kleber, X. ; Basset, Philippe

  • Author_Institution
    Univ. de Lyon, Lyon, France
  • fYear
    2012
  • fDate
    25-27 Sept. 2012
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    A new method for evaluating the thermal properties of solid materials at different temperatures is proposed. An array of parallel and long resistive lines is deposited on the surface of the sample that is shaped in a suspended film several hundred μm in thickness. One of the resistive lines of this array is heated with an alternative current. The surface temperature changes in DC and AC regimes are detected by measuring the electrical resistance change of each of the other lines of the array. The length of wires was chosen so that they may be assumed isothermal and heat diffusion operates perpendicularly to them. By measuring the dependence of the surface alternative temperature rise on the modulation frequency f and on the separation between the heating wire and the probe wires, the thermal diffusivity of sample can be determined. The adjustment of the amplitude of the alternative current in the source allows controlling the sample temperature at which the thermal diffusivity is evaluated. For the validation of the proposed method, pure silicon samples were first studied. The experimental bench was set up and resistive source and probes were experimentally characterized. Results obtained at different temperatures until 500 K for pure silicon are in good accordance with the ones obtained elsewhere in the scientific literature by modeling as well as other experimental techniques.
  • Keywords
    electric resistance; heating elements; silicon; thermal diffusivity; thin films; wires (electric); AC regime; DC regime; alternative current; different temperature levels; electrical resistance; heat diffusion; heating wire; isothermal diffusion; modulation frequency; probe wires; resistive lines; resistive source; silicon samples; solid materials; surface alternative temperature; surface temperature; suspended film; thermal diffusivity; thermal method; thermal property; Frequency measurement; Heating; Probes; Silicon; Temperature measurement; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal Investigations of ICs and Systems (THERMINIC), 2012 18th International Workshop on
  • Conference_Location
    Budapest
  • Print_ISBN
    978-1-4673-1882-2
  • Type

    conf

  • Filename
    6400603