Title :
A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structure
Author :
Maeda, Yuji ; Terao, Kyohei ; Suzuki, Takumi ; Shimokawa, Fusao ; Takao, Hidekuni
Author_Institution :
Dept. of Intell. Mech. Syst., Kagawa Univ., Takamatsu, Japan
Abstract :
In this paper, a tactile sensor with detection abilities of hardness and friction of object surface is proposed and reported. The new detection principles of friction and hardness are realized with the reference plane structure on the device. The device was fabricated with LSI/MEMS integration technology. Completed the devices were evaluated, and the measured normal force sensitivity was 0.07mV/mN/V. On the other hand, the shear force sensitivity was 0.73mV/mN/V. This performance corresponds to the detection ability of frictional coefficient around 0.1. Also, shore A hardness was successfully measured in the range from 22 to 99 HS.
Keywords :
image sensors; microfabrication; microsensors; object detection; tactile sensors; LSI-MEMS integration technology; frictional coefficient; hardness detection; integrated tactile image sensor; object surface detection principles; reference plane structure; shear force sensitivity; surface friction detection; Arrays; Force; Force measurement; Friction; Sensitivity; Silicon; Tactile sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411053
