Improved high precision optical angle measurement system with no interference of light gradients and mismatch

Author

Oehm, J. ; Koch, Christian ; Stoychev, I. ; Gornik, A.

Author_Institution

Analogue Integrated Circuits Res. Group, Ruhr-Univ. Bochum, Bochum, Germany

fYear

2012

fDate

9-12 Dec. 2012

Firstpage

209

Lastpage

212

Abstract

Previously presented optical angle detection systems for incoming light have been proven to be sensitive to inhomogeneities in the intensity distribution of incoming light rays. In addition, it was found that gradients in some wafer parameters may also have a considerable influence on the measurement accuracy. An improved sensor design is presented that uses a common centroid architecture. Influences from gradient effects in the intensity distribution of the light source as well as process mismatch are successfully overcome by this design.

Keywords

light sources; optical sensors; optical variables measurement; common centroid architecture; gradient effects; high precision optical angle measurement system; incoming light rays; intensity distribution; light source; measurement accuracy; optical angle detection systems; process mismatch; sensor design; wafer parameters; Accuracy; Light emitting diodes; Light sources; Metals; Optical sensors; Optical variables measurement; Semiconductor device measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits and Systems (ICECS), 2012 19th IEEE International Conference on

Conference_Location

Seville

Print_ISBN

978-1-4673-1261-5

Electronic_ISBN

978-1-4673-1259-2

Type

conf

DOI

10.1109/ICECS.2012.6463764

Filename

6463764