Research on the S-type linear piezoelectric motor

This paper has presented a S-type linear piezoelectric motor based on the principle of inchworm, and analyzed the structure and operation principle of the motor. Based on the analysis of the actuator´s stator, the output performance of proposed actuator is analyzed. Experimental results show that the output displacement of the actuator is stable, and the displacement for single step is 0.625μm when the actuating voltage is 100 V. The velocity and acceleration properties of the linear actuator are tested. According to the testing results, the dynamic response performance of the actuator is analyzed deeply. The experimental results show that the proposed piezoelectric linear actuator has good dynamic performance and stability motion.