In-situ observation of temperature distribution of microheaters using near-infrared CCD imaging system

Author

Saito, Takashi ; Weichih Lin ; Atsumo, I. ; Shirakashi, J.

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan

fYear

2013

fDate

2-4 Jan. 2013

Firstpage

466

Lastpage

469

Abstract

Temperature distribution of microheaters during electromigration (EM) was observed by near-infrared (NIR) charge coupled device (CCD) imaging system. The temperature of the hot spot, located at the tip of the microheater, was well controlled with varying the applied voltage. Microheaters were broken during EM processes, and breakdown region clearly corresponded to the position of the hot spot. These results imply that NIR CCD imaging system is a useful tool for the investigation of the temperature distribution of microheaters.

Keywords

CCD image sensors; electromigration; temperature distribution; EM; charge coupled device; electromigration; in-situ observation; microheaters; near-infrared CCD imaging system; temperature distribution; Charge coupled devices; Gold; Heating; Imaging; Temperature distribution; Temperature measurement; Wires; CCD and EM; NIR; in-situ observation; microheater; thermal distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoelectronics Conference (INEC), 2013 IEEE 5th International

Conference_Location

Singapore

ISSN

2159-3523

Print_ISBN

978-1-4673-4840-9

Electronic_ISBN

2159-3523

Type

conf

DOI

10.1109/INEC.2013.6466079

Filename

6466079