• DocumentCode
    598407
  • Title

    X-ray sensor based on pixelated scintillation film on photodiode arrays

  • Author

    Chao-Qun Xu ; Ying Sun ; Da-Zhong Zhu ; Yan Han

  • Author_Institution
    Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
  • fYear
    2012
  • fDate
    Oct. 29 2012-Nov. 1 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A X-ray sensor based on pixelated CsI:Tl scintillation directly deposited on 6 ×6 P+/Nwell/Psub photodiode arrays was proposed in this paper. The photodiode arrays fabricated through high temperature diffusion and photolithography technology has sensitivity about 10nA/lux under visible light and leak current about 1.2nA. The pixelation of scintillation was achieved by on-chip netlike SU-8 photoresist. The SU-8 photoresist is 81.6um in height and 25um in width.
  • Keywords
    X-ray detection; caesium compounds; leakage currents; optical sensors; photodiodes; photolithography; photoresists; solid scintillation detectors; thallium; CsI:Tl; SU-8 photoresist; X-ray sensor; high temperature diffusion; leakage current; photodiode arrays; photolithography technology; pixelated scintillation film; size 25 mum; size 81.6 mum; Films; Fluorescence; Photodiodes; Resists; Sensitivity; Sensor arrays; Substrates; SU-8 photoresist; X-ray sensor; photodiode arrays; pixilated scintillation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
  • Conference_Location
    Xi´an
  • Print_ISBN
    978-1-4673-2474-8
  • Type

    conf

  • DOI
    10.1109/ICSICT.2012.6467847
  • Filename
    6467847