Title :
X-ray sensor based on pixelated scintillation film on photodiode arrays
Author :
Chao-Qun Xu ; Ying Sun ; Da-Zhong Zhu ; Yan Han
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
A X-ray sensor based on pixelated CsI:Tl scintillation directly deposited on 6 ×6 P+/Nwell/Psub photodiode arrays was proposed in this paper. The photodiode arrays fabricated through high temperature diffusion and photolithography technology has sensitivity about 10nA/lux under visible light and leak current about 1.2nA. The pixelation of scintillation was achieved by on-chip netlike SU-8 photoresist. The SU-8 photoresist is 81.6um in height and 25um in width.
Keywords :
X-ray detection; caesium compounds; leakage currents; optical sensors; photodiodes; photolithography; photoresists; solid scintillation detectors; thallium; CsI:Tl; SU-8 photoresist; X-ray sensor; high temperature diffusion; leakage current; photodiode arrays; photolithography technology; pixelated scintillation film; size 25 mum; size 81.6 mum; Films; Fluorescence; Photodiodes; Resists; Sensitivity; Sensor arrays; Substrates; SU-8 photoresist; X-ray sensor; photodiode arrays; pixilated scintillation;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6467847
