Control of chemical composition of rare-earth substituted iron garnets using biased target deposition

Author

Krishnan, Nachimuthu ; Martyniuk, M. ; Jeffery, R.D. ; Woodward, R.C. ; Dell, J.M. ; Faraone, L.

Author_Institution

Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia

fYear

2012

fDate

12-14 Dec. 2012

Firstpage

95

Lastpage

96

Abstract

Rare earth cerium substituted europium iron garnets (CeEu)₃(FeGa)₅O₁₂ (Ce:EIG) as well as the elemental oxides were deposited on fused quartz substrates using Biased Target Deposition (BTD). The Ce:EIG films are prepared at low temperature (80-120°C) by sputtering four metallic targets simultaneously using a low energy ion beam. This method provides control over the material composition in a predictable way by controlling the bias duty cycle on individual targets.

Keywords

cerium compounds; europium compounds; iron compounds; sputter deposition; thin films; (CeEu)₃(FeGa)₅O₁₂; SiO₂; biased target deposition; chemical composition; elemental oxides; fused quartz substrates; rare-earth substituted iron garnets; sputtering; temperature 80 degC to 120 degC; thin films; Australia; Films; Garnets; Iron; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on

Conference_Location

Melbourne, VIC

ISSN

1097-2137

Print_ISBN

978-1-4673-3047-3

Type

conf

DOI

10.1109/COMMAD.2012.6472377

Filename

6472377