Multifunctional PECVD Layers: Dopant Source, Passivation, and Optics

In this study, the feasibility of creating one dielectric layer system acting simultaneously as antireflection coating, phosphorous doping source, masking against metal plating, and surface passivation is presented. Moreover, a similar layer stack is described, which behaves as rear-side surface passivation, boron dopant source, and internal reflection mirror. The optical characteristics of these layers are especially investigated and optimized for a solar cell´s front- and rear-side coating. By consequent use of the multifunctional layers, a totally diffused solar cell with rear-side passivation and local rear contacts can be produced using only one wet chemical bath sequence, one multilayer vacuum step, and one high-temperature process. We present the first proof of concept for such a solar cell production using multifunctional plasma-enhanced chemical vapor deposition layers resulting already in a conversion efficiency of 18.3%.