Title :
Sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes
Author :
Hui Chen ; Pallapa, Manu ; Weijie Sun ; Zhendong Sun ; Yeow, John T. W.
Author_Institution :
Coll. of Autom. Sci. & Eng., South China Univ. of Technol., Guangzhou, China
fDate :
Aug. 29 2012-Sept. 1 2012
Abstract :
In this paper, a first-order sliding mode controller is implemented to control the tilt angle of a 2-Degree-of-freedom (DOF) torsional MEMS micromirror with sidewall electrodes. Stability of the closed-loop system is proved by Lyapunov method. Furthermore, both the experimental and simulation results are shown to verify the effectiveness of the control scheme. It is demonstrated that the torsional MEMS micromirror with proposed sliding mode controller has good transient response and tracking performance.
Keywords :
Lyapunov methods; closed loop systems; micro-optomechanical devices; microelectrodes; micromirrors; optical control; spatial variables control; stability; transient response; variable structure systems; 2-DOF torsional MEMS micromirror; 2-degree-of-freedom torsional MEMS micromirror; Lyapunov method; closed loop system stability; first-order sliding mode controller; sidewall electrodes; tilt angle control; tracking performance; transient response; Manufacturing; Nanoscale devices; 2D torsional MEMS micromirror; sidewall electrodes; sliding mode control (SMC);
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
DOI :
10.1109/3M-NANO.2012.6472945
