DocumentCode :
600063
Title :
Finite element simulation of PTFE nano-film two-phase filter
Author :
Yankun Liu ; Wenzhong Lou ; Qingfan Shi ; Mingru Guo ; Peng Liu
Author_Institution :
Sch. of Phys., Beijing Inst. of Technol., Beijing, China
fYear :
2012
fDate :
Aug. 29 2012-Sept. 1 2012
Firstpage :
416
Lastpage :
419
Abstract :
With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.
Keywords :
finite element analysis; membranes; micromechanical devices; nanotechnology; COMSOL Multiphysics; MEMS technology; PTFE membrane filter; PTFE nanofilm two-phase filter; fabrication; finite element simulation; microelectromechanical system; micropores films; nanotechnology; Apertures; Films; Filtration; Mathematical model; Nanobioscience; Nanostructured materials; Filter; Finite Element Analysis; PTFE nano-film;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
Type :
conf
DOI :
10.1109/3M-NANO.2012.6472965
Filename :
6472965
Link To Document :
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